3D Optical Profilometers

Roughness, Texture, and Film Thickness Measurement

3D Optical Profiling Microscope VK-X4000

Wide-Area Optical Profiler VR-6000

	VK-X4000	VR-6000
Magnification	42× - 28,800×	12× - 160×
Height (Z) Resolution	0.01 nm	0.1 µm
XY Resolution	0.12 µm	0.5 µm
Measurement Method(s)	Laser Confocal, Interferometry, Focus Variation, Spectral Interference	White Light LED Fringe Projection
Film Thickness	Yes	No
Surface Roughness	Yes	Yes
NIST Traceable	Yes	Yes
Max Measurement Area	100 mm × 100 mm	300 mm × 150 mm
Gantry Compatible	Yes	Yes

Non-contact 3D measurement on any material

One-click, full 3D surface analysis

Measure any shape, including steep slopes

3D Optical Profiling Microscope
VK-X4000

Capture full surface data

Measure 3D changes over a large area

Compare scan data against CAD model

Wide-Area Optical Profiler
VR-6000

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Learn more in the catalog

3D Optical Profiling Microscope VK-X4000 Series

Wide-Area Optical Profiler VR-6000 Series