Measurement head VK-X3100

VK-X3100 - Measurement head

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Specifications

Model		VK-X3100
Type		Measurement head
Total magnification		42 to 28800×^*1
Field of view		11 to 7398 μm
Measurement principle		Laser confocal, Focus variation, White light interferometry, Spectral interference
Laser wavelength		Semiconductor laser, 404 nm
Max. laser measurement speed		Surface: 125 Hz, Line: 7900 Hz^*2
Max. laser output		1.0 mW
Laser class		Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10^*3)
Laser light-receiving element		16-bit photomultiplier
White light source		White LED
White-light-receiving element		High-definition color CMOS
Laser confocal	Height display resolution	0.1 nm
	Height repeatability σ	10×: 100 nm, 20×: 40 nm, 50×: 12 nm
	Height accuracy	0.2+L/ 100 μm or less^*4
	Width display resolution	0.1 nm
	Width repeatability 3σ	10×: 200 nm, 20×: 100 nm, 50×: 40 nm
	Width accuracy	Measured value ±2% or less^*4
Focus variation	Height display resolution	0.1 nm
	Height repeatability σ	5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm
	Height accuracy	0.2+L/ 100 μm or less^*4
	Width display resolution	0.1 nm
	Width repeatability 3σ	5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm
	Width accuracy	Measured value ±2% or less^*4
White light interferometry	Height display resolution	0.01 nm
	Width display resolution	0.1 nm
	Surface topography repeatability	0.08 nm^*5
	Repeatability of RMS	0.008 nm^*5
Spectral interference film thickness measurement	Repeatability σ	0.1 nm^*5
	Accuracy	±0.6%^*5
Optical observation	Number of pixels	5.6 million
	Revolver	6-hole electric revolver
	Ring illumination lens	2.5×, 5×, 10×
	Optical zoom	1 to 8×
XY stage configuration	Manual operation range	70 × 70 mm 2.76” × 2.76”
	Motorized operation range	100 × 100 mm 3.94” × 3.94”
Power supply	Power voltage	100 to 240 VAC, 50/60 Hz
	Power consumption	150 VA
Environmental resistance	Ambient temperature	+15 to 28°C 59 to 82.4°F
	Relative humidity	20 to 80% RH (No condensation)
Weight		Approx. 13 kg
^1 When using a 23-inch full-screen display. ^2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan measurement pitch is within 0.1 μm. ^3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice. ^4 When measuring a standard sample with a 20× or greater lens. ^*5 Typical values under the default measurement environment.

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