Observation and Measurement of Power Semiconductors (Power Devices) Using Digital Microscopes

Unlike typical semiconductors that handle data, such as CPUs and memory, power semiconductors control electric power and are called power devices. This section introduces examples of how to observe and measure power semiconductors (power devices) using digital microscopes.

What is a Power Semiconductor?

Observation and Measurement of Power Semiconductors (Power Devices) Using Digital Microscopes

Although not defined clearly, semiconductors that control a large amount of voltage and current and have a rated current of 1 A or more are generally called power semiconductors.

Functions of Power Semiconductors

A: Inverter a: Direct current b: Alternating current

A: Inverter a: Direct current
b: Alternating current

Inverter:
Converts direct current (DC) into alternating current (AC).

A: Converter a: Alternating current b: Direct current

A: Converter a: Alternating current
b: Direct current

Converter:
Converts AC into DC.

A: Frequency conversion a: Alternating current

A: Frequency conversion
a: Alternating current

Frequency conversion:
Converts the AC frequency.

A: Regulator a: Direct current

A: Regulator a: Direct current

Regulator:
Converts the DC voltage.

Power Semiconductor Types and Characteristics

Power diode

Function: Rectification
Power diodes conduct current in one direction with no switching.

Power transistor

Function: Switching and amplification

  • Thyristor
    Thyristors were the first power transistors to become available and are characterized by a high withstand voltage.
  • Power metal-oxide-semiconductor field-effect transistor (MOS FET)
    Power MOS FETs are characterized by high speed and high frequency. These power transistors are commonly used for products with a low withstand voltage range up to approximately 200 V. Typical products are IT devices including laptops.
  • Insulated-gate bipolar transistor (IGBT)
    IGBTs are characterized by high withstand voltage, high speed, and high frequency. These power transistors are commonly used for products with a medium to high withstand voltage range of 200 V or higher. Typical products include electric vehicles, hybrid vehicles, and railroad cars.

Power Semiconductor (Power Device) Observation and Measurement Examples Using Digital Microscopes

These are the latest examples of observation and measurement of power semiconductors using KEYENCE’s VHX Series 4K Digital Microscope.

3D measurement of probe dents on a power semiconductor

1000×, coaxial illumination

1000×, coaxial illumination

3D measurement of a probe dent on an IGBT

1000×, coaxial illumination

1000×, coaxial illumination

Observation of a defective part on a power semiconductor
Surface irregularities are visualized in Optical Shadow Effect mode, which allows for quick determination of whether defective areas were caused by adhesion or dents.

200×, coaxial illumination

200×, coaxial illumination

Optical Shadow Effect mode (Color Map) image

Optical Shadow Effect mode (Color Map) image

Observation of a material for power semiconductor wafers
Using the ring-reflection removal function eliminates glare from the surfaces.

100×, ring illumination, normal image

100×, ring illumination, normal image

Image after ring-reflection removal

Image after ring-reflection removal

Observation of fillers in a power semiconductor mold resin
Using the HDR function improves contrast, allowing for accurate profile measurement of fillers.

1000×, coaxial illumination + HDR

1000×, coaxial illumination + HDR

Automatic area measurement image

Automatic area measurement image