Spectral-Interference Wafer Thickness Meter
SI-F80R series
Head Extension Unit SI-FA100
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | SI-FA100*1 | |||
Separate type | SI-FA100 | |||
Type | Expansion controller*2 | |||
No. of connectable spectrum units | 1 | |||
Display | Minimum display unit | N/A | ||
Display range | ||||
Display cycle | ||||
Terminal block | Laser remote interlock input | N/A*3 | ||
TIMING1 input | ||||
RESET1 input | ||||
Auto-zero1 input | ||||
Laser control input | ||||
Analog voltage output | ±10 V x 1 output, Output impedance: 100 Ω*3 | |||
Analog current output | 4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*3 | |||
Alarm output | N/A*3 | |||
General comparator output | ||||
Expansion connector | TIMING2 input | |||
RESET input | ||||
Auto-zero input | ||||
Program switch input | ||||
Alarm output | ||||
Comparator/ binary output | Binary output | |||
Strobe output | ||||
Binary selection output | ||||
Binary selection input | ||||
RS-232C interface | N/A | |||
USB interface | ||||
Ethernet interface | ||||
Major functions | 12 Out simultaneous measurement | |||
Rating | Power voltage | Supplied from the main controller | ||
Current consumption | ||||
Environmental resistance | Ambient temperature | 0 to +50 °C 32 to 122 °F*4 | ||
Relative humidity | 35 to 85 % RH (No condensation) | |||
Vibration resistance | 10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions | |||
Weight | Approx. 300 g | |||
*1 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3). |