Spectral-Interference Wafer Thickness Meter
SI-F80R series
Controller SI-F1000
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | SI-F1000*1 | |||
Type | Main Controller Separate type*2 | |||
No. of connectable spectrum units | 2 | |||
Display | Minimum display unit | 0.001 µm | ||
Display range | ±999.999 µm to ±9999.99 mm (7 settings selectable) | |||
Display cycle | 10 times/sec | |||
Terminal block | Laser remote interlock input | Non-voltage or voltage input *3.*4 | ||
TIMING1 input | ||||
RESET1 input | ||||
Auto-zero1 input | ||||
Laser control input | ||||
Analog voltage output | ±10 V x 2 outputs, Output impedance: 100 Ω*4 | |||
Analog current output | 4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*4 | |||
Alarm output | NPN open-collector output (N.C.)*4 | |||
General comparator output | NPN open-collector output *5*4 | |||
Expansion connector | TIMING2 input | Non-voltage or voltage input *3.*4 | ||
RESET input | ||||
Auto-zero input | ||||
Program switch input | Non-voltage input x 3 inputs*4 | |||
Alarm output | NPN open-collector output (N.C.)*4 | |||
Comparator/ binary output | Binary output | Measured value data output (21 bits) OUT selectable NPN open-collector output*4 | ||
Strobe output | NPN open-collector output *5*4 | |||
Binary selection output | ||||
Binary selection input | Non-voltage or voltage input *3.*4 | |||
RS-232C interface | Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable) | |||
USB interface | In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible) | |||
Ethernet interface | 100BASE-TX/10BASE-T | |||
Major functions | 12 Out simultaneous measurementcalculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,interferometer mode, mask, connection of setting support software, etc. | |||
Rating | Power voltage | 24 VDC ±10 %, Ripple (P-P) 10 % or less | ||
Current consumption | One head connected: 0.6 A or less, Six heads connected: 1.5 A or less. | |||
Environmental resistance | Ambient temperature | 0 to +50 °C 32 to 122 °F*6 | ||
Relative humidity | 35 to 85 % RH (No condensation) | |||
Vibration resistance | 10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions | |||
Weight | Approx. 600 g | |||
*1 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3). |