Micro-head Spectral-interference Laser Displacement Meter

SI-F series

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Specs Micro-head Spectral-interference Laser Displacement Meter SI-F series

Model

SI-F01

SI-F10

SI-F80

Image

Type

Micro-head type Sensor head

Long distance type Sensor head

Thickness measurement type Sensor head

Measurement range

0.05 to 1.1 mm 0.002" to 0.04" *1

11.3 to 12.35 mm 0.44" to 0.49" *1

0.05 to 1.1 mm 0.002" to 0.04" *6
(Possible detection distance : 80 to 81.1 mm 3.15" to 3.19")

Light source

Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2)

Spot diameter

ø20 µm ø0.000787"*3

ø40 µm ø0.001575"*3

ø20 µm ø0.000787"*3

Linearity

±0.3 µm ±0.000012"*4

±0.3 µm ±0.000012"*7

Resolution

0.25 µm 0.00000984"*5

Sampling cycle

200 µs

Light source for guide

Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2)

LED display

Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange.

Temperature fluctuation

0.01% of F.S./°C

Environmental resistance

Enclosure rating

IP67

IP64

Ambient light

Incandescent lamp or Fluorescent lamp: 10,000 lux max.

Ambient temperature

0 to +85 °C 32 to 185 °F

0 to +40 °C 32 to 104 °F

0 to +50 °C 32 to 122 °F

Relative humidity

35 to 85 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions

Material

SUS

Material

Sensor head

Spectrum unit

Polycarbonate

Weight

Approx. 24 g (including cable)

Approx. 38 g (including cable)

Approx. 39 g (including cable)

*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01".
*2 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice.
*3 Indicates the minimum beam spot diameter within the measurement range.
*4 This value is obtained when the measurement target is a glass plate with the number of averaging measurements set to 256.
*5 This value is obtained by measuring a glass plate surface located at the center of the measurement range with the number of averaging measurements set to 4,096.
*6 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range.
*7 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256.

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Model

SI-F1001V

SI-FA100*3

Image

Separate type

SI-F1001/SI-FD500

SI-FA100

Type

Built-in main controller type

Expansion controller*4

No. of connectable spectrum units

2

1

Display

Minimum display unit

0.001 µm

N/A

Display range

±999.999 µm to ±9999.99 mm (7 settings selectable)

Display cycle

10 times/sec.

Terminal block

Laser remote interlock input

Non-voltage input*1

N/A*1

TIMING1 input

RESET1 input

Auto-zero1 input

Laser control input

Analog voltage output

±10 V x 2 outputs, Output impedance: 100 Ω*1

±10 V x 1 output, Output impedance: 100 Ω*1

Analog current output

4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*1

4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*1

Alarm output

NPN open-collector output (N.C.)*1

N/A*1

General comparator output

NPN open-collector output*1

Expansion connector

TIMING2 input

Non-voltage input*1

RESET input

Auto-zero input

Program switch input

Non-voltage input x 3 inputs*1

Alarm output

NPN open-collector output (N.C.)*1

Comparator/ binary output

Binary output

Measured value data output (21 bits) OUT selectable NPN open-collector output*1

Strobe output

NPN open-collector output*1

Binary selection output

Binary selection input

Non-voltage input*1

RS-232C interface

Measured data output and control input/output (Baud rate selectable to 115,200 bps max.)

N/A

USB interface

USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible)

Ethernet interface

100Base-TX/10Base-T

Major functions

12 Out simultaneous measurement
calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
interferometer mode, mask, connection of setting support software, etc.

Rating

Power voltage

24 VDC ±10 %, Ripple (P-P) 10 % or less

Supplied from the main controller

Current consumption

One head connected: 0.6 A or less. Six heads connected: 1.5 A or less.

Environmental resistance

Ambient temperature

0 to +50 °C 32 to 122 °F*2

Relative humidity

35 to 85 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions

Weight

Approx. 600 g

Approx. 300 g

*1 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
• Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
• Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
*2 When two or more expansion controllers are connected, the ambient temperature is 0 to +40 °C 32 to 104 °F.
*3 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3).
*4 Up to four expansion controllers can be connected to the main controller.

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