Applications Micro-head Spectral-interference Laser Displacement Meter SI-F series

SI-F Series Applications

Unbeatable Performance in Automation and Sensing Applications.

Measuring wafer thickness

The micro-head can be used to measure the thickness and warpage of high-precision objects such as silicon wafers.

[ADVANTAGE] Ultra high-resolution
Resolution of 0.001 μm 0.00004 mil
Multifunctional controller
The arithmetic operation circuit instantly converts the measurement data to a thickness
No heat generation
There are no electrical components in the head that generate heat

Measuring the behavior of rollers in a copy machine

The micro-head can be used to measure the behavior of each component inside precision machines such as copy machines.

[ADVANTAGE] ø2 mm ø0.08" micro-head
No special location is needed for installation
Heat resistant to 85°C 185°F
Measurement is possible even beside an exothermic body
5-kHz high-speed sampling
Even high-speed targets can be measured securely

Positioning high-accuracy stages

The micro-head can be used to detect the location at which a stage stops, allowing the difference from the reference value to be fed back to the related equipment.

[ADVANTAGE] Setting distance of 10 mm 0.39" or longer
There is no danger of collision
Up to six-axis simultaneous measurement
Multi-axis control is achieved with no time errors
ø8 mm ø0.47" small head
No special location is needed for installation

Measuring roller run out with high accuracy

The micro-head can be used to measure the run out in rollers, which demand precise measurement, such as in the case of coating rollers.

[ADVANTAGE] No damage to workpiece
Non-contact measurement prevents damage to workpieces
Direct indication of amount of run out
The amount of run out is instantly calculated and displayed by the controller
5-kHz high-speed sampling
The high-speed rotation of target objects can be followed

Measuring exposure mask gaps

The micro-head can be used to measure the gap between an exposure mask and glass substrate.

[ADVANTAGE] Setting distance of 80 mm 3.15"
The micro-head can be installed even when the mask is thick
ø12mm ø0.47" small head
No special location is required for installation
No heat generation
There are no electrical components in the head to generate heat

Measuring the thickness of glass discs

The micro-head can be used to measure the thickness of optically transparent targets, such as glass discs.

[ADVANTAGE] Ultra high-resolution
Resolution of 0.001 μm 0.0004 mil
5-kHz high-speed sampling
The thickness of rapidly rotating targets can be measured
Up to six-axis simultaneous measurement
Multi-axis control is achieved with no time errors