Micro-head Spectral-interference Laser Displacement Meter

SI-F series

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Micro-head Spectral-interference Laser Displacement Meter SI-F series

Micro-Head Spectral-Interference Laser Displacement Meter

  • [Best in its Class] Resolution: 1nm (0.00004 mil)
  • [World's Smallest] Micro Head Size: ø2 mm (ø0.08")
  • [First in the Industry] Measurement principle: Spectral interference method

SI-F series - Micro-head Spectral-interference Laser Displacement Meter

Introducing the world’s first micro-head, with the highest measurement accuracy in its class and a level of performance that was previously thought impossible. These micro-head sensors can be used to measure the thickness and warpage of high-precision objects such as silicon wafers.

View Catalog SI-F Series Micro-head Spectral-interference Laser Displacement Meter (Export Control Products included) Catalog

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Features

Ultra High Resolution 1nm

Spectral Interference Method that enables 1 nm Resolution.

Head Variations That Expand the Range of Possible Measurements

The lineup includes ultra-small, long-range, and other specialized heads to match a variety of applications.

Eliminates the Causes of Measurement Errors

The measurement head consists of only optical fibers and lenses, with no electronic parts.