3D Interference Measurement Sensor
WI-5000 series
Sensor head Wide-field Model WI-010
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | WI-010*1*2*3 | |||
Reference distance | 18 mm 0.71" | |||
Measurement range | Z | 1.4 mm 0.06" (Standard Mode), 0.7 mm 0.03" (High Speed Mode) | ||
XY | 10 × 10 mm 0.39" × 0.39" | |||
Minimum detection area | 40 × 40 µm 0.001575" × 0.001575" | |||
Repeatability (height difference) | 0.1 µm 0.000004"*4 | |||
Linearity (height difference) | ±2.8 µm 0.000110"(±0.2% of F.S., F.S. = 1.4 mm 0.06", +20 to +30°C +68 to +86°F)*5 | |||
Light source for measurement | Type | Infrared SLD | ||
Center wavelength | 830 nm | |||
Laser class (IEC60825-1) | Class 3R | |||
Output | 3.6 mW | |||
Guide light source | Type | Red semiconductor laser | ||
Wavelength | 660 nm | |||
Laser class (IEC60825-1) | Class 1 | |||
Output | 0.15 mW | |||
Sampling frequency | Internal Trigger | 133 ms (High Speed Mode), 266 ms (Standard Mode) | ||
External Trigger | 266 ms max. (High Speed Mode), 532 ms max. (Standard Mode)*6 | |||
Environmental resistance | Ambient light | Incandescent lamp/fluorescent lamp: 5,000 lux max. | ||
Ambient temperature | 0 to +35 °C 32 to 95 °F | |||
Relative humidity | 20 to 85 % RH (No condensation) | |||
Weight | Approx. 3,000 g | |||
*1 The laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice.The resolution of the height (distance from head reference plane to measurement workpiece) is 1 µm(*2). |