Confocal Displacement Sensor

CL-3000 series

Catalogs View Catalog

Specs Confocal Displacement Sensor CL-3000 series

Optical Units and Sensor Heads - Quad type (Export Control Products)

Model

CL-L007G

CL-L015G

CL-L030G

CL-L070G

CL-L150G

Image

Type

Optical unit

Head

CL-L007 *1

CL-L015 *1

CL-L030 *1

CL-L070 *1

CL-L150 *1

Reference distance

7 mm 0.28 "

15 mm 0.59 "

30 mm 1.18 "

70 mm 2.76 "

150 mm 5.91"

Reference measurement range

Measurement range

±1.5 mm ±0.06"

±1.3 mm ±0.05"

±3.7 mm ±0.15"

±10 mm ±0.39"

±35 mm ±1.38"

Linearity

±1.95 μm ±0.000077" *2

±0.36 μm ±0.000014 " *2

±0.81 μm ±0.000032 " *2

±2.0 μm ±0.000079 " *2

±5.5 μm ±0.000217" *2

High precision measurement range

Measurement range

±0.5 mm ±0.02"

±1.0 mm ±0.04"

±3.0 mm ±0.12"

±15 mm ±0.59"

Linearity

±0.78 μm ±0.000031" *2

±0.28 μm ±0.000011" *4

±0.59 μm ±0.000023" *2

±1.9 μm ±0.000075" *2

±4.5 μm ±0.000177" *2

Resolution

0.015 μm 0.000001" *3

0.003 μm *3

0.015 μm 0.000001" *3

0.025 μm 0.000001" *3

0.1 μm 0.000004" *3

Spot diameter

ø750 μm ø0.0295"

ø300 μm ø0.0118"

ø500 μm ø0.0197"

ø600 μm ø0.0236"

ø1000 μm ø0.04"

Laser class

Optical unit

Class I

Sampling cycle

100/200/500/1000 μs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance: 30000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C 32 to 122°F

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm 0.06"; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm 0.01"; 2 hours each for X, Y, and Z axes

Shock resistance

15 G, 6 ms

Temperature characteristic

Head

0.005% of F.S./°C

Optical unit

0.015% of F.S./°C

Material

Head

SUS

Front: SUS, Rear: Aluminum

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g 4.94 oz

Approx. 180 g 6.35 oz

Approx. 200 g 7.06 oz

Approx. 280 g 9.88 oz

Approx. 380 g 13.41 oz

Optical unit

Approx. 1600 g 3.53 lb

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).
*4 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface) .

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Optical Units and Sensor Heads - Focused spot type (Export Control Products)

Model

CL-P007G

CL-P015G

CL-P030G

CL-P070G

CL-P150G

Image

Type

Optical unit

Head

CL-P007 *1

CL-P015 *1

CL-P030 *1

CL-P070 *1

CL-P150 *1

Reference distance

7 mm 0.28"

15 mm 0.59"

30 mm 1.18"

70 mm 2.76"

150 mm 5.91"

Reference measurement range

Measurement range

±1.5 mm ±0.06"

±1.3 mm ±0.05"

±3.7 mm ±0.15"

±10 mm ±0.39"

±35 mm ±1.38"

Linearity

±0.83 μm ±0.000033" *2

±0.36 μm ±0.000014" *2

±0.81 μm ±0.000032" *2

±2.0 μm ±0.000079" *2

±5.5 μm ±0.000217" *4

High precision measurement range

Measurement range

±0.5 mm ±0.02"

±1.0 mm ±0.04"

±3.0 mm ±0.12"

±15 mm ±0.59"

Linearity

±0.43 μm ±0.000017" *2

±0.28 μm ±0.000011" *2

±0.59 μm ±0.000023" *2

±1.9 μm ±0.000075" *2

±4.5 μm ±0.000177" *4

Resolution

0.015 μm 0.000001" *3

0.003 μm *3

0.015 μm 0.000001" *3

0.025 μm 0.000001" *3

0.1 μm 0.000004" *3

Spot diameter

ø50 μm ø0.0020"

ø25 μm ø0.0010"

ø38 μm ø0.0015"

ø50 μm ø0.0020"

ø75 μm ø0.0030"

Laser class

Optical unit

Class I

Sampling cycle

100/200/500/1000 μs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance: 30000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C 32 to 122°F

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm 0.06"; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm 0.01"; 2 hours each for X, Y, and Z axes

Shock resistance

15 G, 6 ms

Temperature characteristic

Head

0.005% of F.S./°C

Optical unit

0.015% of F.S./°C

Material

Head

SUS

Front: SUS, Rear: Aluminum

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g 4.94 oz

Approx. 180 g 6.35 oz

Approx. 200 g 7.06 oz

Approx. 280 g 9.88 oz

Approx. 380 g 13.41 oz

Optical unit

Approx. 1600 g 3.53 lb

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface) .
*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).
*4 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).

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Optical Units and Sensor Heads - Quad type

Model

CL-L007N

CL-L015N

CL-L030N

CL-L070N

CL-L150N

Image

Type

Optical unit

Head

CL-L007 *1

CL-L015 *1

CL-L030 *1

CL-L070 *1

CL-L150 *1

Reference distance

7 mm 0.28"

15 mm 0.59"

30 mm 1.18"

70 mm 2.76"

150 mm 5.91"

Reference measurement range

Measurement range

±1.5 mm ±0.06"

±1.3 mm ±0.05"

±3.7 mm ±0.15"

±10 mm ±0.39"

±35 mm ±1.38"

Linearity

±2.1 μm ±0.000083" *2

±0.49 μm ±0.000019" *2

±0.94 μm ±0.000037" *2

±2.2 μm ±0.000087" *2

±5.65 μm ±0.000222" *2

High precision measurement range

Measurement range

±0.5 mm ±0.02"

±1.0 mm ±0.04"

±3.0 mm ±0.12"

±15 mm ±0.59"

Linearity

±0.91 μm ±0.000036" *2

±0.41 μm ±0.000016" *2

±0.72 μm ±0.000028" *2

±2.0 μm ±0.000079" *2

±4.65 μm ±0.000183" *2

Resolution

0.25 μm 0.000010" *3

Spot diameter

ø750 μm ø0.0295"

ø300 μm ø0.0118"

ø500 μm ø0.0197"

ø600 μm ø0.0236"

ø1000 μm ø0.04"

Laser class

Optical unit

Class I

Sampling cycle

100/200/500/1000 μs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance: 30000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C 32 to 122°F

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm 0.06"; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm 0.01"; 2 hours each for X, Y, and Z axes

Shock resistance

15 G, 6 ms

Temperature characteristic

Head

0.005% of F.S./°C

Optical unit

0.015% of F.S./°C

Material

Head

SUS

Front: SUS, Rear: Aluminum

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g 4.94 oz

Approx. 180 g 6.35 oz

Approx. 200 g 7.06 oz

Approx. 280 g 9.88 oz

Approx. 380 g 13.41 oz

Optical unit

Approx. 1600 g 3.53 lb

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).

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Optical Units and Sensor Heads - Focused spot type

Model

CL-P007N

CL-P015N

CL-P030N

CL-P070N

CL-P150N

Image

Type

Optical unit

Head

CL-P007 *1

CL-P015 *1

CL-P030 *1

CL-P070 *1

CL-P150 *1

Reference distance

7 mm 0.28"

15 mm 0.59"

30 mm 1.18"

70 mm 2.76"

150 mm 5.91"

Reference measurement range

Measurement range

±1.5 mm ±0.06"

±1.3 mm ±0.05"

±3.7 mm ±0.15"

±10 mm ±0.39"

±35 mm ±1.38"

Linearity

±0.96 μm ±0.000038" *2

±0.49 μm ±0.000019" *2

±0.94 μm ±0.000037" *2

±2.2 μm ±0.000087" *2

±5.65 μm ±0.000222" *2

High precision measurement range

Measurement range

±0.5 mm ±0.02"

±1.0 mm ±0.04"

±3.0 mm ±0.12"

±15 mm ±0.59"

Linearity

±0.55 μm ±0.000022" *2

±0.41 μm ±0.000016" *2

±0.72 μm ±0.000028" *2

±2.0 μm ±0.000079" *2

±4.65 μm ±0.000183" *2

Resolution

0.25 μm 0.000010"

Spot diameter

ø50 μm ø0.0020"

ø25 μm ø0.0010"

ø38 μm ø0.0015"

ø50 μm ø0.0020"

ø75 μm ø0.0030"

Laser class

Optical unit

Class I

Sampling cycle

100/200/500/1000 μs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance: 30000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C 32 to 122°F

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm 0.06"; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm 0.01"; 2 hours each for X, Y, and Z axes

Shock resistance

15 G, 6 ms

Temperature characteristic

Head

0.005% of F.S./°C

Optical unit

0.015% of F.S./°C

Material

Head

SUS

Front: SUS, Rear: Aluminum

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g 4.94 oz

Approx. 180 g 6.35 oz

Approx. 200 g 7.06 oz

Approx. 280 g 9.88 oz

Approx. 380 g 13.41 oz

Optical unit

Approx. 1600 g 3.53 lb

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).

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Model

CL-S015G

CL-S015EXG

CL-V020G

CL-V050G

CL-PT010G

Image

Type

Optical unit

Head

CL-S015 *1

CL-S015EX *1

CL-V020 *1

CL-V050 *1

CL-PT010 *1

Reference distance

15 mm 0.59"

20 mm 0.79"

50 mm1.97"

10 mm 0.39"

Reference measurement range

Measurement range

±1.0 mm ±0.04"

±1.3 mm ±0.05"

±4 mm ±0.16"

±0.3 mm ±0.01"

Linearity

±0.2 μm ±0.000008" *2

±0.3 μm ±0.000012" *2

±1.25 μm ±0.000049" *2

±0.11 μm ±0.000004" *7

High precision measurement range

Measurement range

-0.2 mm/-1.0 mm -0.01/-0.04"

±0.5 mm ±0.02"

±1.6 mm ±0.06"

±0.15 mm ±0.01"

Linearity

±0.1 μm ±0.000004" *2

±0.23 μm ±0.000009" *2

±1.15 μm ±0.000045" *2

±0.09 μm ±0.000004" *2

Resolution

0.003 μm *3

0.01 μm *3

0.03 μm 0.000001" *3

0.001 μm *3

Spot diameter

ø10 μm ø0.0004"

ø20 μm ø0.0008"

ø40 μm ø0.0016"

ø3.5 μm ø0.000138"

Laser class

Optical unit

Class I

Sampling cycle

100/200/500/1000 μs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP50

IP40 degassed structure for vacuum environments *5

IP64 (IEC60529)

Ambient light

Target surface illuminance: 30000 lux (Incandescent lamp)

Operating ambient temperature

Head

-20 to 70°C -4 to 158°F

-20 to 200°C -4 to 392°F

0 to 50°C 32 to 122°F

Optical unit

0 to 50°C 32 to 122°F

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm 0.06"; 2 hours each for X, Y, and Z axes

10 to 57 Hz, double amplitude 0.45 mm 0.02" 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm 0.01"; 2 hours each for X, Y, and Z axes

Shock resistance

15 G, 6 ms

Vacuum

Vacuum environments

Ultra-high-vacuum environments *6

None

Explosion-proof

performance

Head

None

IECEx: Ex op is IIC T6 Ga
ATEX: II 1 G Ex op is IIC T6 Ga
NRTL/ACO: Class I, Zone 0, AEx op is IIC T6 Ga Class I, Division 1, Groups A, B, C, D, T6

None

Optical unit

IECEx: Ex op is IIC T6 Ga
ATEX: II (1) G [Ex op is IIC T6 Ga]
NRTL/ACO: Class I, Zone 0, [AEx op is IIC T6 Ga] Class I, Division 1, Groups A, B, C, D, T6

Zone/Division

Head

IECEx: Zone 0
ATEX: Zone 0
NRTL/ACO: Zone 0/Division 1

Optical unit

Do not install in a hazardous location (associated equipment)

Ambient temperature

Head

-20°C ≤ Ta ≤ 70°C -4°F ≤ Ta ≤ 158°F

Optical unit

0°C ≤ Ta ≤ 50°C 32°F ≤ Ta ≤ 122°F

Certification number

IECEx: IECEx CSAE 23.0033X
ATEX: CSANe 23ATEX1133X
NRTL/ACO: 23CA80171819X

Temperature characteristic

Head

0.005% of F.S./°C *4

0.013% of F.S./°C *4

0.015% of F.S./°C *4

0.1% of F.S./°C *4

Optical unit

0.015% of F.S./°C

Material

Head

SUS303/304

SUS304

Front: SUS, Rear: Aluminum

Optical unit

Polycarbonate

Weight

Head

Approx. 350 g 12.36 oz

Approx. 100 g 3.53 oz

Approx. 1100 g 2.43 lb

Optical unit

Approx. 1600 g 3.53 lb

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).
*4 These figures are based on the case where a jig made of SUS303 (or SUS304) is fixed between the head and the object.
*5 The enclosure rating is equivalent to IP50 when the included sticker is attached.
*6 Operation verification has been performed in environments of 10^-6 Pa.
*7 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface) .

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Model

CL-S015N

CL-S015EXN

CL-V020N

CL-V050N

CL-PT010N

Image

Type

Optical unit

Head

CL-S015 *1

CL-S015EX *1

CL-V020 *1

CL-V050 *1

CL-PT010 *1

Reference distance

15 mm 0.59"

20 mm 0.79"

50 mm1.97"

10 mm 0.39"

Reference measurement range

Measurement range

±1.0 mm ±0.04"

±1.3 mm ±0.05"

±4 mm ±0.16"

±0.3 mm ±0.01"

Linearity

±0.35 μm ±0.000014" *2

±0.45 μm ±0.000018" *2

±1.4 μm ±0.000055" *2

±0.22 μm ±0.000009" *2

High precision measurement range

Measurement range

-0.2 mm/-1.0 mm -0.01/-0.04"

±0.5 mm ±0.02"

±1.6 mm ±0.06"

±0.15 mm ±0.01"

Linearity

±0.25 μm ±0.000010" *2

±0.38 μm ±0.000015" *2

±1.3 μm ±0.000051" *2

±0.2 μm ±0.000008" *2

Resolution

0.25 μm 0.000010" *3

Spot diameter

ø10 μm ø0.0004"

ø20 μm ø0.0008"

ø40 μm ø0.0016"

ø3.5 μm ø0.000138"

Laser class

Optical unit

Class I

Sampling cycle

100/200/500/1000 μs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP50

IP40 degassed structure for vacuum environments *5

IP64 (IEC60529)

Ambient light

Target surface illuminance: 30000 lux (Incandescent lamp)

Operating ambient temperature

Head

-20 to 70°C -4 to 158°F

-20 to 200°C -4 to 392°F

0 to 50°C 32 to 122°F

Optical unit

0 to 50°C 32 to 122°F

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm 0.06"; 2 hours each for X, Y, and Z axes

10 to 57 Hz, double amplitude 0.45 mm 0.02" 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm 0.01"; 2 hours each for X, Y, and Z axes

Shock resistance

15 G, 6 ms

Vacuum

Vacuum environments

Ultra-high-vacuum environments *6

None

Explosion-proof

performance

Head

None

IECEx: Ex op is IIC T6 Ga
ATEX: II 1 G Ex op is IIC T6 Ga
NRTL/ACO: Class I, Zone 0, AEx op is IIC T6 Ga Class I, Division 1, Groups A, B, C, D, T6

None

Optical unit

IECEx: [Ex op is IIC T6 Ga]
ATEX: II (1) G [Ex op is IIC T6 Ga]
NRTL/ACO: Class I, Zone 0, [AEx op is IIC T6 Ga] Class I, Division 1, Groups A, B, C, D, T6

Zone/Division

Head

IECEx: Zone 0
ATEX: Zone 0
NRTL/ACO: Zone 0/Division 1

Optical unit

Do not install in a hazardous location (associated equipment)

Ambient temperature

Head

-20°C ≤ Ta ≤ 70°C -4°F ≤ Ta ≤ 158°F

Optical unit

0°C ≤ Ta ≤ 50°C 32°F ≤ Ta ≤ 122°F

Certification number

IECEx: IECEx CSAE 23.0033X
ATEX: CSANe 23ATEX1133X
NRTL/ACO: 23CA80171819X

Temperature characteristic

Head

0.005% of F.S./°C *4

0.013% of F.S./°C *4

0.015% of F.S./°C *4

0.1% of F.S./°C *4

Optical unit

0.015% of F.S./°C

Material

Head

SUS303/304

SUS304

Front: SUS, Rear: Aluminum

Optical unit

Polycarbonate

Weight

Head

Approx. 350 g 12.36 oz

Approx. 100 g 3.53 oz

Approx. 1100 g 2.43 lb

Optical unit

Approx. 1600 g 3.53 lb

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).
*4 These figures are based on the case where a jig made of SUS303 (or SUS304) is fixed between the head and the object.
*5 The enclosure rating is equivalent to IP50 when the included sticker is attached.
*6 Operation verification has been performed in environments of 10^-6 Pa.

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