Head Multi-color laser + Touch probe model LM-X100TL

LM-X100TL - Head Multi-color laser + Touch probe model

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Manuals

Specifications

Model				LM-X100TL
Type				Head
Image sensor				1", 20-megapixel monochrome CMOS
Receiver lens				Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode		325 mm × 175 mm 12.80" × 6.89"
		High-precision measurement mode		306 mm × 156 mm 12.05" × 6.14"
	Minimum display unit			0.1 μm
	Repeatability	Inside camera's field of view (2σ)	Wide-field measurement mode	±0.5 μm
			High-precision measurement mode	±0.1 μm
		With stage movement	X/Y axis	±0.9 μm
			X/Y plane
	Measurement accuracy	Inside camera's field of view (2σ)	Wide-field measurement mode	±2 μm ^*1
			High-precision measurement mode	±0.7 μm ^*2
		With stage movement	X/Y axis (EUX,MPE , EUY,MPE)	±(1.8 + 0.02 L) μm ^*3
			X/Y plane (EUXY,MPE)	±(2.8 + 0.02 L) μm ^*3
AF height measurement	Repeatability			±2 μm
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) μm ^*4
Laser height measurement	Measurable range (X/Y)			239 mm × 146 mm 9.41" × 5.75"
	Minimum display unit			0.1 μm
	Repeatability			±0.6 μm ^*5
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) μm ^*4
	Spot diameter			ø50 μm
	Laser class			Class 1
Touch probe measurement	Measurable range (X/Y)			248 mm × 141 mm 9.76" × 5.55"
	Measuring force			0.015 N ^*6
	Minimum display unit			0.1 μm
	Repeatability	X/Y axis		±1.4 μm
		X/Y plane
		Z-axis
	Measurement accuracy	X/Y axis (EUX,MPE EUY,MPE)		±(2.8 + 0.02 L) μm ^*7
		X/Y plane (EUXY,MPE)		±(3.8 + 0.02 L) μm ^*7
		Z axis (EUZ,MPE)		±(4.8 + 0.04 L) μm ^*4
External remote input				Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.			PhotoMOS output Rated load: 24 VDC, 0.5 A ON resistance: 50 mΩ or lower
Illumination system	Transparent			Telecentric transparent green LED illumination
	Ring			Four division, multi-angle color LED/ white LED illumination (electric) Slit ring (directivity) side green LED illumination (electric) Telecentric coaxial white LED illumination
External illumination control	Intensity control			PWM control, 100 kHz
	Output voltage			12 VDC
	Output current			1.6 A (max.)
XY stage	Moving range			300 mm × 150 mm 11.81" × 5.91" (motorized)
	Withstand load			7 kg 15.43 lb
Z stage	Moving range			75 mm 2.95" (electric)
Power supply	Power voltage			100 to 240 VAC ±10% (50/60 Hz)
	Power consumption			150 VA or less
Environmental resistance	Ambient temperature			+10 to 35°C +50 to 95°F ^*8
	Relative humidity			20 to 80% RH (no condensation)
	Overvoltage category			ll
	Pollution degree			2
Weight				Approx. 35 kg 77.16 lb
^1 In the range of 20 mm × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^2 In the range of 5 mm × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^3 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units) ^4 In accordance with ISO 10360-7, for plane-to-point height, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to measurement of a target with a maximum height of 50 mm 1.97" or less, (L = amount of Z stage movement in mm inch units) ^5 In-house measurement of a standard target at an operating ambient temperature of +23°C ±1°C +73.4°F ±1.8°F ^6 Typical value ^7 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units) ^8 With an XY-motorized stage travel speed of 80 mm/s 3.15 inch/s: +15 to 35°C +59°F to 95°F

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