200 mm square stage Model incorporating programmable ring-illumination/light probe unit IM-8020

IM-8020 - 200 mm square stage Model incorporating programmable ring-illumination/light probe unit

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Specifications

Model				IM-8020
Type				Head
Image sensor				1" 20-megapixel monochrome CMOS
Display				12.1" LCD monitor (WXGA: 1280 × 800)
Receiver lens				Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode		200 × 200 mm 7.87" × 7.87" (4× R50 R1.97")
		High-precision measurement mode		125 × 125 mm 4.92" × 4.92"
	Minimum display unit			0.1 μm
	Repeatability	Wide-field measurement mode	Without stage movement	±1 μm
			With stage movement	±2 μm
		High-precision measurement mode	Without stage movement	±0.5 μm
			With stage movement	±1.5 μm
	Measurement accuracy (±2σ)	Wide-field measurement mode	Without binding	±3.9 μm ^*1
			With binding	±(7 + 0.02 L) μm ^*2
		High-precision measurement mode	Without binding	±2 μm ^*3
			With binding	±(4 + 0.02 L) μm ^*4
	Outer diameter measurement	Measurement accuracy	Wide-field measurement mode	±(2.8 + 0.02 D) μm ^*5
			High-precision measurement mode	±(1.4 + 0.04 D) μm ^*6
Light probe measurement	Measurable area (XY)			90 × 90 mm 3.54" × 3.54"
	Maximum measurement depth			30 mm 1.18"
	Light probe diameter			ø3 mm ø0.12"
	Measuring force			0.015 N
	Repeatability			±2 μm ^*7
	Measurement accuracy			±(8 + 0.02 L) μm ^*8
External remote input				Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.			PhotoMos output Rated load: 24 VDC 0.5 A ON resistance: 50 mΩ or lower
Interface	LAN			RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
	USB 3.1			4 ports (rear: 4)
	USB 2.0 series A			4 ports (front: 2, rear: 2)
	Monitor output			DVI-D
Record	Hard disk drive			500 GB
Illumination system	Transparent			Telecentric transparent illumination
	Ring			Four division, multi-angle illumination (electric), Slit ring (directivity) illumination (electric)
XY stage	Moving range			100 × 100 mm 3.94" × 3.94" (electric)
	Withstand load			5 kg
Z stage	Moving range			75 mm 2.95" (electric)
Power supply	Power voltage			100 to 240 VAC ±10%, 50/60 Hz
	Power consumption			430 VA or lower
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
	Relative humidity			20 to 80% RH (no condensation)
	Overvoltage category			II
	Pollution degree			2
Weight				Approx. 30 kg
^1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position. ^2 In the range of 180 × 180 mm 7.09" × 7.09" (4× R40 R1.57"), within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position, and with a load weighing 2 kg or less on the stage. L is the amount of stage movement (in mm inch). ^3 In the range of ø20 mm 0.79", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position. ^4 In the range of 120 × 120 mm 4.72" × 4.72", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position, and with a load weighing 2 kg or less on the stage. L is the amount of stage movement (in mm inch). ^5 Within the range of L118 mm × ø60 mm L4.65" × ø2.36". At the focal point position, with the part positioned in the center of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F. D is the Y direction distance (in mm inch). ^6 Within the range of L106 mm × ø20 mm L4.17" × ø0.79". At the focal point position, with the part positioned in the center of the lens field of view, and with the shaft direction of the part facing the horizontal direction of the lens field of view. Within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F. D is the Y direction distance (in mm inch). ^7 When the detection system is standard. If the detection system is at a deep position, ±3 μm. ^8 When the detection system is standard, within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F, and with a load weighing 2 kg or less on the stage. If the detection system is at a deep position, ±(10 + 0.02 L) μm with L as the measurement length (in mm inch).

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