Wide-Area 3D Measurement System
VR series
Recommended Replaceable Products: 3D Optical Profilometer Head (Fully-automated model) - VR-6200
Contact Us: 1-888-539-3623 Inquiry form
Wide-Area 3D Measurement System Head VR-3200
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | VR-3200 | |||
Type | Head | |||
Applicable controller | VR-3000K | |||
Field-of-view | Wide-field mode | Magnification on a | Horizontal | 24.0 mm 0.94" |
Vertical | 18.0 mm 0.71" | |||
Magnification on a | Horizontal | 12.0 mm 0.47" | ||
Vertical | 9.0 mm 0.35" | |||
Magnification on a | Horizontal | 8.0 mm 0.31" | ||
Vertical | 6.0 mm 0.24" | |||
Magnification on a | Horizontal | |||
Vertical | 4.5 mm 0.18" | |||
High magnification mode | Magnification on a | Horizontal | 7.6 mm 0.30" | |
Vertical | 5.7 mm 0.22" | |||
Magnification on a | Horizontal | 3.8 mm 0.15" | ||
Vertical | 2.9 mm 0.11" | |||
Magnification on a | Horizontal | 2.5 mm 0.10" | ||
Vertical | 1.9 mm 0.07" | |||
Magnification on a | Horizontal | |||
Vertical | 1.4 mm 0.06" | |||
Zoom | 1x to 4x | |||
Measurable height | Wide-field mode:10 mm 0.39" (±5 mm ±0.20") High magnification mode:1 mm 0.04" (±0.5 mm ±0.02")*1 | |||
Display resolution | 0.1 µm*2 | |||
Repeatability (σ) | Height measurement | 0.5 µm*3 | ||
Width measurement | Wide-field mode: 1 µm, High magnification mode: 0.5 µm*3 | |||
Measurement | Height measurement | ±3 µm*3 | ||
Width measurement | Wide-field mode: ±5 µm, High magnification mode: ±2 µm*3 | |||
Stitching function | Full automatic (XY stage automatic control + auto focus) measurement*4 | |||
Stage | XY stroke | 184 × 88 mm 7.24" x 3.46" (motorized) | ||
Z stroke | 90 mm 3.54"(electric) | |||
Rotation | ±180°(sample rotating stage) | |||
Tilt | ±30° or more | |||
Working distance | 75 mm 2.95" | |||
Image receiving element | 4 megapixel monochrome CMOS | |||
Transmitter lens | Double telecentric lens x2 | |||
Receiver lens | Double telecentric lens | |||
Light sources | Observation light source | LED ring light (red, green, blue) | ||
Measurement light source | White LED | |||
Image size | 1024 x 768 pixels, 2048 x 1536 pixels | |||
Data processing | Dedicated PC specified by KEYENCE (OS: Windows 7)*5 | |||
Rating | Power voltage | 100 to 240 VAC ±10 %, 50/60 Hz | ||
Power consumption | 150 VA | |||
Environmental resistance | Ambient temperature | +15 to +30 °C 59 to 86 °F | ||
Relative humidity | 35 to 80 % RH (No condensation) | |||
Weight | 28.0 kg | |||
*1 Low range ±5 mm 0.20" and high range ±0.5 mm ±0.02" around the focal point position. |