3D Laser Scanning Confocal Microscope

VK-X series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Measurement unit VK-X160K

VK-X160K - Measurement unit

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Data Sheet (PDF)

Specifications

Model		VK-X160K
Total magnification		Up to 19200×^*1
Field of view (minimum range)		16 µm to 5400 µm
Frame rate	Laser measurement speed	4 to 120 Hz, 7900 Hz^*2
Measurement principles	Optical system	Pinhole confocal optical system
	Light receiving element	16-bit photomultiplier
	Scanning method (during general measurement and image stitching)	Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII), poor reflected light intensity supplement (Double Scan)
Height measurement	Display resolution	5 nm
	Linear scale
	Dynamic range	16 bits
	Repeatability σ	20× 40 nm , 50× 20 nm , 100× 20 nm ^*3
	Memory for Z-axis measurement	1.4 million steps
	Accuracy	0.2+L/100 µm or less (L=Measuring Length)^*3
Z stage configuration	Structure	Base with separate measuring head
	Maximum sample height	28 mm 1.102", 128 mm 5.039" (option)
Width measurement	Display resolution	10 nm
	Repeatability 3σ	20× 100 nm, 50× 50 nm, 100× 30 nm^*3
	Accuracy	±2%^*3
XY stage configuration	Manual: Operating range	70 mm×70 mm 2.76" × 2.76"
	Motorized: Operating range	50 mm × 50 mm 1.97" × 1.97" 100 mm × 100 mm 3.94" × 3.94"^*4
Observation	Observation image	Super-high-resolution color CCD image 16-bit laser color confocal image Confocal + ND filter optical system C-laser differential interference image
	Maximum capture resolution	3072×2304
Measurement laser light source	Wavelength	Red semiconductor laser, 658 nm
	Maximum output	0.95 mW
	Laser Class	Class 2 laser product (IEC60825-1)
Weight	Microscope unit	Approx. 25 kg (sensor head detached: approx. 8.5 kg)
	Controller	Approx. 11 kg
^1 For 23-inch monitors. ^2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan has a measurement pitch that is within 0.1 µm. ^3 When measuring a standard sample (standard scale) with a 20× or greater lens at an ambient temperature of 20 ± 2°C 68 ± 3.6°F. However, does not apply to the VK-X120/130 with a 100× lens. ^4 When a motorized stage is mounted.

Data Sheet (PDF) Other Models