Wide-Area 3D Measurement System Head VR-5200

Model

VR-5200

Type

Head

Light sources

Observation light source

LED ring light (red, blue, green)

Measurement light source

White LED

Controller

VR-5000

Field-of-view

Low magnification (wide field of view)

Magnification on a 15" monitor 12×

Horizontal

24.0 mm 0.94"

Vertical

18.0 mm 0.71"

Magnification on a 15" monitor 25×

Horizontal

12.0 mm 0.47"

Vertical

9.0 mm 0.35"

Magnification on a 15" monitor 38×

Horizontal

8.0 mm 0.31"

Vertical

6.0 mm 0.24"

Magnification on a 15" monitor 50×

Horizontal

Vertical

4.5 mm 0.18"

High magnification (high resolution)

Magnification on a 15" monitor 40×

Horizontal

7.6 mm 0.30"

Vertical

5.7 mm 0.22"

Magnification on a 15" monitor 80×

Horizontal

3.8 mm 0.15"

Vertical

2.9 mm 0.11"

Magnification on a 15" monitor 120×

Horizontal

2.5 mm 0.10"

Vertical

1.9 mm 0.07"

Magnification on a 15" monitor 160×

Horizontal

Vertical

1.4 mm 0.06"

Zoom

1× to 4×

Height measurement

Display resolution

0.1 µm

Height measurementrange

Without Z stitching

Low magnification (wide field of view) : 10 mm 0.39"
High magnification (high resolution) : 1 mm 0.04"

With Z stitching

Low magnification (wide field of view) : 50 mm 1.97"
High magnification (high resolution) : 30 mm 1.18"

Repeatability (σ)

Without Z stitching

0.4 µm^*1

With Z stitching

1.0 µm^*1

Measurement accuracy

Without Z stitching

±2.5 µm^*1

With Z stitching

±4.0 µm^*1

Width measurement

Repeatability (σ)

Low magnification (wide field of view) : 1 µm
High magnification (high resolution) : 0.5 µm
^*1

Measurement accuracy

Low magnification (wide field of view) : ±5 µm
High magnification (high resolution) : ±2 µm
^*1

Stitching function

Fully-automated measurement (XY automatic control + Z automatic control)^*2

XY measurable range

206 x 104 mm 8.11" x 4.09"^*2

Stage

XY stroke

184 x 88 mm 7.24" x 3.46" (motorized)

Z stroke

73 mm 2.87" (motorized)

Load capacity

4.5 kg

Working distance

75 mm 2.95"

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double-telecentric lens x 2

Receiver lens

Double-telecentric lens

Data processing

Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

200 VA max.

Environmental resistance

Ambient temperature

+15 to 30 °C 59 to 86 °F

Relative humidity

20 to 80 % RH (no condensation)

Weight

Approx. 28 kg^*3