Wide-Area 3D Measurement System

VR series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Recommended Replaceable Products: 3D Optical Profilometer Head (Standard model) - VR-6100

Wide-Area 3D Measurement System Head VR-5100

VR-5100 - Wide-Area 3D Measurement System Head

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Data Sheet (PDF)

Specifications

Model				VR-5100
Type				Head
Light sources	Observation light source			LED ring light (red, blue, green)
	Measurement light source			White LED
Controller				VR-5000
Field-of-view	Low magnification (wide field of view)	Magnification on a 15" monitor 12×	Horizontal	24.0 mm 0.94"
			Vertical	18.0 mm 0.71"
		Magnification on a 15" monitor 25×	Horizontal	12.0 mm 0.47"
			Vertical	9.0 mm 0.35"
		Magnification on a 15" monitor 38×	Horizontal	8.0 mm 0.31"
			Vertical	6.0 mm 0.24"
		Magnification on a 15" monitor 50×	Horizontal
			Vertical	4.5 mm 0.18"
	High magnification (high resolution)	Magnification on a 15" monitor 40×	Horizontal	7.6 mm 0.30"
			Vertical	5.7 mm 0.22"
		Magnification on a 15" monitor 80×	Horizontal	3.8 mm 0.15"
			Vertical	2.9 mm 0.11"
		Magnification on a 15" monitor 120×	Horizontal	2.5 mm 0.10"
			Vertical	1.9 mm 0.07"
		Magnification on a 15" monitor 160×	Horizontal
			Vertical	1.4 mm 0.06"
Zoom				1× to 4×
Height measurement	Display resolution			0.1 µm
	Height measurementrange	Without Z stitching		Low magnification (wide field of view) : 10 mm 0.39" High magnification (high resolution) : 1 mm 0.04"
		With Z stitching		Low magnification (wide field of view) : 50 mm 1.97" High magnification (high resolution) : 30 mm 1.18"
	Repeatability (σ)	Without Z stitching		0.4 µm^*1
		With Z stitching		1.0 µm^*1
	Measurement accuracy	Without Z stitching		±2.5 µm^*1
		With Z stitching		±4.0 µm^*1
Width measurement	Repeatability (σ)			Low magnification (wide field of view) : 1 µm High magnification (high resolution) : 0.5 µm ^*1
	Measurement accuracy			Low magnification (wide field of view) : ±5 µm High magnification (high resolution) : ±2 µm ^*1
Stitching function				Manual measurement (XY manual operation + Z automatic control)^*2
XY measurable range				92 x 86 mm 3.62" x 3.39"^*2
Stage	XY stroke			70 x 70 mm 2.76" x 2.76" (manual)
	Z stroke			73 mm 2.87" (motorized)
	Load capacity			4.5 kg
Working distance				75 mm 2.95"
Image receiving element				4 megapixel monochrome CMOS
Transmitter lens				Double-telecentric lens x 2
Receiver lens				Double-telecentric lens
Data processing				Dedicated PC specified by KEYENCE (OS: Windows 10 Pro)
Power supply	Power voltage			100 to 240 VAC, 50/60 Hz
	Power consumption			200 VA max.
Environmental resistance	Ambient temperature			+15 to 30 °C 59 to 86 °F
	Relative humidity			20 to 80 % RH (no condensation)
Weight				Approx. 25 kg^*3
^1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1 °C 73.4±1.8 °F) ^2 Measurement expansion module (VR-H3J) required ^*3 Weight of only measurement unit: Approx. 11 kg

Data Sheet (PDF) Other Models