3D Laser Scanning Confocal Microscope

VK-X series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Recommended Replaceable Products: 3D Surface Profiler - VK-X3000 series

Shape Measurement Laser Microscope VK-X110

VK-X110 - Shape Measurement Laser Microscope

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Data Sheet (PDF)

Specifications

Model			VK-X110
Type			Measurement unit
Objective lens magnification	Magnification on a 15” monitor 200x		10×
	Magnification on a 15” monitor 400x		20×
	Magnification on a 15” monitor 1000x		50×
	Magnification on a 15” monitor 2000x		100×
Observation/ measuring range	Horizontal (H): μm Mil	Magnification on a 15” monitor 200x	1350 53.15
		Magnification on a 15” monitor 400x	675 26.57
		Magnification on a 15” monitor 1000x	270 10.63
		Magnification on a 15” monitor 2000x	135 5.31
	Vertical (V): μm Mil	Magnification on a 15” monitor 200x	1012 39.84
		Magnification on a 15” monitor 400x	506 19.92
		Magnification on a 15” monitor 1000x	202 7.95
		Magnification on a 15” monitor 2000x	101 3.98
Working distance: mm inch	Magnification on a 15” monitor 200x		16.5 0.65"
	Magnification on a 15” monitor 400x		3.1 0.12"
	Magnification on a 15” monitor 1000x		0.54 0.02"
	Magnification on a 15” monitor 2000x		0.3 0.01"
Numerical Aperture (N.A.)	Magnification on a 15” monitor 200x		0.3
	Magnification on a 15” monitor 400x		0.46
	Magnification on a 15” monitor 1000x		0.8
	Magnification on a 15” monitor 2000x		0.95
Optical zoom			1x to 8x
Total magnification			200x to 16000x
Optical system for observation/measurement			Pinhole confocal optical system
Height measurement	Measuring range		7 mm 0.28"
	Display resolution		0.005 µm
	Repeatability σ		0.02 µm ^*1
Width measurement	Display resolution		0.01 µm
	Repeatability 3σ		0.03 µm^*2
Frame memory	Pixel count		2048 x 1536, 1024 x 768, 1024 x 64
	For monochrome image		16 bit
	For color image		8-bit for RGB each
	For height measurement		21-bit
Frame rate	Surface scan		4 Hz to 120 Hz
	Line scan		7900 Hz
Auto function			AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings
Measurement laser light source	Wavelength		Red semiconductor laser, 658 nm
	Maximum output		0.95 mW
	Laser Class		Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 ^*3)
Laser light-receiving element			PMT (Photoelectron Multiplier Tube)
Light source for optical observation	Lamp		100 W halogen lamp
Color camera for optical observation	Imaging element		1/3" Color CCD image sensor
	Recording resolution		Super high resolution (3072×2304)
	Auto adjustment		Gain, Shutter speed
Data processing unit			Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) ^*4
Software	Auto-focus software		This is software that automatically focuses the image during observation.
	Pixel shift software		This is software that increases the number of pixels recorded by shifting pixels during image recording.
	HDR function software		This is software that obtains 16-bit data to optimize the image appearance.
	RPD function software		This is an algorithm that detects the measurement result quickly and accurately.
	AAG function software		This is software that automatically adjusts the laser light-receiving sensitivity within the setting range.
	Auto upper/lower limit setting software		This is software that automatically recognizes the upper and lower limits of the target and sets the measurement range.
	Beginner mode function software		This is software that can be used to easily perform measurements as flow charts.
	Comment function software		This is software that displays comments on the observation screen.
	Measurement and scale display software		This is software that displays a scale on the dimension measurement and observation screen.
Rating	Power voltage		100 to 240 VAC ±10 %, 50/60 Hz
	Power consumption		450 VA max.
Weight			Approx. 25 kg (Measuring head detached: Approx. 8.5 kg)
^1 When a standard height difference of 2 µm is measured with the 50x objective lens. ^2 When the KEYENCE reference chart line width of 1 µm is measured with the 100x objective lens in line peak mode (image averaging: 8 times). ^3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice. ^4 Windows 7 is a registered trademark of Microsoft, U.S.A.

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