3D Laser Scanning Confocal Microscope

VK-X series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Shape Measurement Laser Microscope VK-X100K

VK-X100K - Shape Measurement Laser Microscope

*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.

Data Sheet (PDF)

Data Sheet (PDF)

Specifications

Model			VK-X100K
Type			Controller
Objective lens magnification	Magnification on a 15” monitor 100x		―
	Magnification on a 15” monitor 200x
	Magnification on a 15” monitor 400x
	Magnification on a 15” monitor 1000x
	Magnification on a 15” monitor 2000x
	Magnification on a 15” monitor 3000x
Observation/ measuring range	Horizontal (H): μm Mil	Magnification on a 15” monitor 100x
		Magnification on a 15” monitor 200x
		Magnification on a 15” monitor 400x
		Magnification on a 15” monitor 1000x
		Magnification on a 15” monitor 2000x
		Magnification on a 15” monitor 3000x
	Vertical (V): μm Mil	Magnification on a 15” monitor 100x
		Magnification on a 15” monitor 200x
		Magnification on a 15” monitor 400x
		Magnification on a 15” monitor 1000x
		Magnification on a 15” monitor 2000x
		Magnification on a 15” monitor 3000x
Working distance: mm inch	Magnification on a 15” monitor 100x
	Magnification on a 15” monitor 200x
	Magnification on a 15” monitor 400x
	Magnification on a 15” monitor 1000x
	Magnification on a 15” monitor 2000x
	Magnification on a 15” monitor 3000x
Numerical Aperture (N.A.)	Magnification on a 15” monitor 100x
	Magnification on a 15” monitor 200x
	Magnification on a 15” monitor 400x
	Magnification on a 15” monitor 1000x
	Magnification on a 15” monitor 2000x
	Magnification on a 15” monitor 3000x
Optical zoom			1x to 8x
Total magnification			100x to 8000x
Optical system for observation/measurement			Pinhole confocal optical system
Height measurement	Measuring range		7 mm 0.28"
	Display resolution		0.005 µm
	Repeatability σ		0.02 µm ^*1
Width measurement	Display resolution		0.01 µm
	Repeatability 3σ		0.05 µm ^*2
Frame memory	Pixel count		2048 x 1536, 1024 x 768, 1024 x 64
	For monochrome image		16 bit
	For color image		8-bit for RGB each
	For height measurement		21-bit
Frame rate	Surface scan		4 Hz to 120 Hz
	Line scan		7900 Hz
Auto function			AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings
Measurement laser light source	Wavelength		Red semiconductor laser, 658 nm
	Maximum output		0.95 mW
	Laser Class		Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 ^*3)
Laser light-receiving element			PMT (Photoelectron Multiplier Tube)
Light source for optical observation	Lamp		100 W halogen lamp
Color camera for optical observation	Imaging element		1/3" Color CCD image sensor
	Recording resolution		Super high resolution (3072×2304)
	Auto adjustment		Gain, Shutter speed
Data processing unit			Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) ^*4
Rating	Power voltage		100 to 240 VAC ±10 %, 50/60 Hz
	Power consumption		450 VA max.
Weight			Approx. 11 kg
^1 When a standard height difference of 2 µm is measured with the 50x objective lens. ^2 When the KEYENCE reference chart line width of 1 µm is measured with the 50x objective lens (optical zoom 2x) in line peak mode (image averaging: 8 times). ^3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice. ^4 Windows 7 is a registered trademark of Microsoft, U.S.A.

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