Wafer Thickness Measurement

Ultra High-accuracy

Reliable Measurement with Spectral interferometry

SI-F series

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Ultra High Resolution
1nm

Spectral Interference Method that enables 1 nm Resolution.

Head Variations That Expand the Range of Possible Measurements

The lineup includes ultra-small, long-range, and other specialized heads to match a variety of applications.

Eliminates the Causes of Measurement Errors

The measurement head consists of only optical fibers and lenses, with no electronic parts.

Spectral-Interference

Laser Displacement Meter

SI-F Series

High-Precision Measurement Lineup Catalog

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Wafer Thickness Measurement

Ultra High Resolution 1nm

Head Variations That Expand the Range of Possible Measurements

Eliminates the Causes of Measurement Errors

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Ultra High Resolution
1nm